Abstract
Electron penetration in semi-infinite Au for normal and oblique angles of incidence at energies between 0.5 and 4 keV is simulated within a Monte-Carlo frame work. The elastic scattering cross sections have been obtained from a modified Rutherford differential cross section, whereas inelastic core and valence electron excitation are calculated using the Gryzinski's expression. The dependence of the backscattering coefficient, mean implantation depth and stopping profiles on the angle of incidence has been examined. These quantities are found to be significantly enhanced as the angle of incidence becomes higher which is generally in consistent with previous simulations.
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