Abstract
The highly sensitive pressure sensor presented in this paper aims at wireless passive sensing in a high temperature environment by using microwave backscattering technology. The structure of the re-entrant resonator was analyzed and optimized using theoretical calculation, software simulation, and its equivalent lump circuit model was first modified by us. Micro-machining and high-temperature co-fired ceramic (HTCC) process technologies were applied to fabricate the sensor, solving the common problem of cavity sealing during the air pressure loading test. In addition, to prevent the response signal from being immersed in the strong background clutter of the hermetic metal chamber, which makes its detection difficult, we proposed two key techniques to improve the signal to noise ratio: the suppression of strong background clutter and the detection of the weak backscattered signal of the sensor. The pressure sensor demonstrated in this paper works well for gas pressure loading between 40 and 120 kPa in a temperature range of 24 °C to 800 °C. The experimental results show that the sensor resonant frequency lies at 2.1065 GHz, with a maximum pressure sensitivity of 73.125 kHz/kPa.
Highlights
Pressure measurement in harsh environment, e.g., an internal combustion engine chamber, high-temperature surrounding, or a biological body, is a crucial problem that urgently requires a solution
The wireless passive LC resonant sensor seems to be the most promising option. While they can work up to 800 ◦ C using high-temperature co-fired ceramic (HTCC) technique [7,8] displaying a maximum sensitivity of 7.9 kHz/kPa, their quality (Q)
A harsh environment oriented, pressure-modulating re-entrant resonator sensor, constructed using alumina ceramic has been proposed in this paper for wireless passive pressure measurement
Summary
Pressure measurement in harsh environment, e.g., an internal combustion engine chamber, high-temperature surrounding, or a biological body, is a crucial problem that urgently requires a solution. The wireless passive LC resonant sensor seems to be the most promising option While they can work up to 800 ◦ C using high-temperature co-fired ceramic (HTCC) technique [7,8] displaying a maximum sensitivity of 7.9 kHz/kPa, their quality (Q). It is well known that waveguides being cut off can be designed as microwave filters by adding a conductive re-entrant post inside them This is equivalent to the introduction of an effective shunt capacitance. A harsh environment oriented, pressure-modulating re-entrant resonator sensor, constructed using alumina ceramic has been proposed in this paper for wireless passive pressure measurement. It displays a high sensitivity of 73.125 kHz/kPa which is approximately. Thereby, we propose two methods to solve the problem of difficulty in signal detection in a metallic environment and realize pressure measurement from 40 to 120 kPa, corresponding to a temperature range between 24 ◦ C and 800 ◦ C
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