Abstract
A passive substrate integrated waveguide (SIW) sensor based on the complementary split ring resonator (CSRR) is presented for pressure detection in high-temperature environments. The sensor pressure sensing mechanism is described through circuit analysis and the electromagnetic coupling principle. The pressure sensor is modeled in high frequency structure simulator (HFSS), designed through parameter optimization. According to the optimized parameters, the sensor was customized and fabricated on a high temperature co-fired ceramic (HTCC) substrate using the three-dimensional co-fired technology and screen-printing technology. The pressure sensor was tested in the high-temperature pressure furnace and can work stably in the ambient environment of 25-500 °C and 10-300 kPa. The pressure sensitivity is 139.77 kHz/kPa at 25 °C, and with increasing temperature, the sensitivity increases to 191.97 kHz/kPa at 500 °C. The temperature compensation algorithm is proposed to achieve accurate acquisition of pressure signals in a high-temperature environment.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
