Size effects of nano-pattern in Si(1 1 1) substrate on the selective growth behavior of GaN nanowires by MOCVD

Abstract

We report on the size effects of nano-patterned Si(111) substrates on the selective growth of GaN nanowires (NWs) using metal organic chemical vapor deposition. The nano-patterns on Si(111) substrates were fabricated by etching process of Au nano-droplets. The size of nano-patterns fabricated on Si(111) substrates were corresponding to size of Au nano-droplets, and the diameter of GaN NWs grown on nano-patterns was similar to the size of nano-pattern. Dense and well-oriented GaN NWs were grown on Si(111) substrates corresponding to the nano-patterns with an average diameter of about 50nm. However, only a few GaN bulk grains, and mixed phase of a few NWs and bulk crystal of GaN were grown on the nano-patterned Si(111) having too small and large diameter, respectively, compare to the nano-patterns with diameter of 50nm. Our results suggested that the selective growth of GaN NWs is strongly affected by the size of nano-patterns and its related mechanism.