Abstract
Two types of optical pressure sensors with silica microspheres are proposed. The size effect of optical silica microsphere pressure sensors is studied by using a single-wavelength laser beam and polarimeters. The silica microspheres with diameters of 1.0 μm, 1.5 μm and 2.0 μm are prepared on garnet substrates by a self-assembly method. The pressure and the optical properties of the silica microspheres are measured by a resistance strain sensor and Thorlabs Stokes polarimeters as a function of the external direct current (DC) voltage. The optical silica microsphere sensor in transmission mode is suitable for pressure measuring. The results show that the pressure increases, while the diameter of the silica microspheres decreases. The maximum internal pressure can reach up to 7.3 × 107 Pa when the diameter of the silica microspheres is 1.0 μm.
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