Abstract
Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. In this paper, a compact optical Fabry–Pérot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology. The pressure sensor consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD). The sensing chip is combined with an FP cavity and a pressure sensing diaphragm which adopts the square film and is fabricated by Silicon on Insulator (SOI) wafer. To calibrate the pressure sensor, the experimental platform which consists of a digital pressure gauge, a pressure loading machine, a digital multimeter, and a laser driver was set up. The experimental results show that the sensitivity of the diaphragm is 117.5 nm/kPa. The measurement range and sensitivity of the pressure sensor are 0–700 Pa and 115 nA/kPa, respectively. The nonlinearity, repeatability, and hysteresis of the pressure sensor are 1.48%FS, 2.23%FS, and 1.59%FS, respectively, which lead to the pressure accuracy of 3.12%FS.
Highlights
Wind disaster is one of the most terrifying disasters in nature [1]
The survey shows that the losses caused by wind disasters account for more than 50% of all losses caused by natural disasters
The pressure sensors are divided into the types of piezoresistive [4], piezoelectric [5], capacitive [6], resonant [7], and optical pressure sensors [8] according to the detection method
Summary
Wind disaster is one of the most terrifying disasters in nature [1]. The survey shows that the losses caused by wind disasters account for more than 50% of all losses caused by natural disasters. Piezoresistive, piezoelectric, resonant, and capacitive pressure sensors are popular due to their simple structure and low cost [9–12] These sensors are affected by electromagnetic interference and are not suitable for wind pressure monitoring of transmission line towers [13,14]. 0.139 mV/kPa. Wang Xue et al reported a pressure sensor based on fiber Fabry–Pérot (FP), which uses a polarization low-coherence interference demodulator to convert the loading pressure on the silicon diaphragm into cavity length information [18]. Wang Xue et al reported a pressure sensor based on fiber Fabry–Pérot (FP), which uses a polarization low-coherence interference demodulator to convert the loading pressure on the silicon diaphragm into cavity length information [18] It shows a relatively linear response within the pressure range of 3 kPa to 283 kPa, which with a sensitivity of.
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