Abstract
In this paper, an optical measurement system is proposed to measure the six-degree-of-freedom (6DOF) geometrical errors of a linear stage, and the errors are analyzed by the interferometric method and the geometrical optics method. Among them, the interferometric method is mainly used for the position error analysis. This method can solve the problem that geometrical optics is limited by the size of the sensor in our previous system, and improve the measurement accuracy of the position error. The geometrical optics method is used for the error analysis of the remaining 5DOF geometrical errors to simplify the data acquisition time and calculation amount. In addition, this paper also proposes a methodology to compensate for laser beam drifts and installation errors of optical components. We use two sensors to measure the 4DOF laser beam drifts and add them into the proposed mathematical model to solve these errors. We also use sensitivity analysis to analyze the influence of each installation error of optical components and find out the installation errors that need to be considered. Then we bring them into the mathematical model and solved them with least square methods. Finally, we verify the feasibility of the proposed measurement system through repeated experiments and comparisons with a commercial interferometer and an electronic level.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
