Site-specific cross-sectioning of carbon nanotube-to-metal junctions for high spatial resolution chemical and structural analysis

Abstract

AbstractIn this study, we have demonstrated successful site-specific cross-sectioning of carbon-nanotube - metal junctions which provided samples suitable for high resolution transmission electron microscopy and electron energy loss spectroscopy. For the cross-sectioning, we have suggested a modified technique based on combination of the Focused Ion Beam (FIB) lift-out and the conventional Ar+ ion milling techniques. Electron-transparent cross-sections of multiwall carbon nanotubes showing no significant surface amorphization or Ga contamination (typical artifacts of conventional FIB lift-out technique) were obtained. High-resolution transmission electron microscopy and electron energy loss spectroscopy of a multi-wall carbon nanotube cross-section have been carried out.