Abstract
SiO2/36° Y-X LiTaO3 substrate which has an excellent characteristic of temperature and a high electro-mechanical coupling coefficient is realized. Temperature coefficient of frequency (TCF) is zero and electro-mechanical coupling coefficient (K2) is 5.2% when thickness of SiO2(H/λ) is 21%. Using this resonator, a voltage controlled oscillator (VCO) with excellent temperature characteristic and wide frequency deviation larger than 800 ppm/V is obtained.
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