Abstract
Single mode waveguide in Nd3+-doped silicate glass substrate was fabricated by ion implantation technique. Nd3+-doped silicate glass is irradiated with 3MeV Ni ions at a fluence of 5×1014ions/cm2. The prism-coupling method is used to measure the effective refractive indices of the waveguide dark modes. Only one mode is found, in which its effective index (neff=1.5207) is higher than the substrate index (nsub=1.5202). The refractive index distribution of the waveguide was reconstructed; and the near-field intensity distribution is in a good agreement with simulated modal profiles. Propagation losses of the light in the waveguides were measured by the back-reflection method. It is found that after annealing the propagation loss of waveguide is effectively reduced.
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