Abstract
X‐ray mirrors are needed for beam guidance, beam alignment and monochromatisation at third‐generation synchrotron light sources (PETRA III) and forthcoming Free‐Electron Lasers (LCLS, European XFEL). Amorphous carbon coatings are currently used as total reflection mirrors at FLASH to guide the photon beam to the various beamlines. These coatings were prepared by means of magnetron sputtering. The new GKSS sputtering facility for the deposition of single and multilayer mirrors with a length of up to 1500 mm and a width of up to 120 mm is in operation. In this contribution we present the results of this new deposition system. A major advantage is that it is now possible to prepare one, two or more mirrors with similar properties over the whole deposition length. The mirror properties were investigated by means of X‐ray reflectometry and interference microscopy. The performance of the mirrors is analyzed, considering X‐ray reflectivity, film thickness and surface roughness. The uniformity of these properties over the whole deposition length of 1500 mm is demonstrated. The results obtained will be discussed and compared with former results.
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