Abstract

Mid-infrared spectroscopy is critical for applications like environmental monitoring and medical diagnostics, as it includes the fundamental vibrational frequencies of many molecular bonds, enabling detailed chemical analysis. We developed a miniature mid-infrared spectrometer using a fully dielectric metasurface operating in the 3–5 µm range. By combining simple structural units, design flexibility was enhanced, resulting in rich spectral data. The spectrometer was evaluated using narrowband, broadband, and transmission spectra of real materials. We detected the spectral responses of metasurface arrays and determined the unknown spectrum using an algorithm based on Tikhonov regularization with generalized cross-validation. By reconstructing multiple narrow spectra obtained through rotating the filters, spectral resolution intervals of approximately 10 nm were achieved.

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