Abstract
We present a single mode vertical-cavity surface-emitting laser (VCSEL) utilizing a single-layer, high-contrast subwavelength grating (HCG) based top mirror, which provides both the ultrahigh reflectivity and lateral transverse modes control. Experimentally, we demonstrate that merely 11 HCG stripes with a thickness of 230nm are required to achieve lasing operation. The finite area of HCG, in combination with an oxide aperture of 2–6μm, effectively discriminates the higher-order transverse modes in VCSELs with a side mode suppression ratio of ⩾40dB. Furthermore, a single (first high-order transverse) mode, high output power of 2.3mW laser was achieved from a VCSEL with a 10μm oxide aperture.
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