Abstract
The realization of SOP (Silicon On Polymer) structures, in other words a single crystal silicon film transferred onto polymer was investigated in this paper. SOP realization technique includes two major steps: polymer bonding and ion slicing. Polymer bonding is used and developed in our process, because it is a technique that allows some benefits (simplification of surface treatments and low temperature processing) in comparison of other bonding methods. Interface observations (infra-red transmission, scanning acoustic microscopy and X-ray reflectivity) and mechanical characterizations (blade insertion and four-points bending) have been developed to define a suitable polymer bonding process. Transferred Si layer quality of SOP structures and the compliance induced by the polymer layer are discussed.
Published Version
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