Abstract
Single-crystal Nb-doped Pb(Zr,Ti)O3 (PNZT) films were grown on electric conducting single-crystal Nb-doped SrTiO3 (Nb:STO) wafers by a sol-gel method. Although the films were of the same composition and prepared under the same condition, different crystal phases with corresponding preferential film orientations were formed when the substrate orientation was changed. [001]-oriented tetragonal PNZT film was formed on the {100} surface of the Nb:STO substrate, whereas [111]-oriented rhombohedral PNZT film on the {111} surface. The PNZT films on SrTiO3 substrates showed considerably high remnant polarization and low coercive field, as compared with conventional PZT films on Si wafers. In particular, high d33 value was obtained in the [001]-oriented PNZT films.
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