Abstract
A silicon Hall device for high accuracy three-axis magnetic field measurements is presented. Its unique geometry allows the extraction of the information about the three magnetic field components simultaneously and at exactly the same point in space. Electrical connection consists of only two energy supply contacts and only four sense contacts. The entire decorrelation of the Hall electrode potentials and the retrieval of the three flux density components is performed by a simple one-stage differential amplification unit. A series of prototypes with the dimensions of the active area of 50, 100, 300 and 500 μm was realized. Sensitivity for the two axes parallel to the chip surface is between 50 and 830 V/AT and for the perpendicular one between 17 and 900 V/AT. Input resistances vary from over 40 kΩ for the small device to less than 1 kΩ for the largest. The active region of the devices is buried under the surface, so that the sensors feature low noise and excellent long-term stability.
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