Abstract
In this paper chemical modification of a poly(vinylidene fluoride) surface by extreme ultraviolet (EUV) irradiation in a presence of ionized nitrogen was demonstrated for the first time. Nitrogen gas, injected into an interaction region, was ionized and excited by the EUV radiation from a laser-plasma source. The ionization degree and excited states of nitrogen were investigated using EUV spectrometry and the corresponding spectra are presented. Chemical modification of polymer after combined EUV and ionized nitrogen treatment was investigated using X-ray photoelectron spectroscopy. A significant contribution of nitrogen atoms in near-surface layer of the polymer after the treatment was demonstrated.
Highlights
This can result in formation of volatile fractions or in changes in chemical structure and composition of the polymer molecules
Some volatile fractions are released from irradiated layer resulting in smooth ablation or modification of the surface morphology due to a preferential dry etching of an amorphous polymer
In our previous work we proposed an extreme ultraviolet (EUV) treatment, as alternative method for surface modification, using a laser-plasma EUV source
Summary
Ification of polymer after combined EUV and ionized nitrogen treatment was investigated using X-ray photoelectron spectroscopy. A significant contribution of nitrogen atoms in near-surface layer of the polymer after the treatment was demonstrated. Different methods can be employed for surface structuring, including chemical [1], plasma [2], or radiation treatment.
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