Abstract
(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching.
Highlights
Development of display and interactive telecommunication technology increases the level of interaction between people and the virtual world, which increases the potential degree of communication
Iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium, lutetium, lanthanum, praseodymium and gadolinium films were those found to be positive-tone patterned under similar conditions as reported for titanium and indium tin [4]
Almost all the metals could be patterned; neodymium, thulium and ytterbium showed no contrast under these conditions
Summary
Development of display and interactive telecommunication technology increases the level of interaction between people and the virtual world, which increases the potential degree of communication. The developments of capacitive type multi-touch panels and thin, high-resolution liquid crystal and organic electroluminescent displays have found extensive application in interactive visual communication products. In order to construct multi-touch panel displays for high-density devices, thin multilayer film structures are independently fabricated on both sides of optically transparent substrates for example borosilicate glass. We have reported a dual-function type of metal chelate complex that as a film can both be directly pattered and perform as a metal oxide precursor. This was accomplished with ortho nitrobenzyl esters of protocatechuic acid, 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC; 1) and
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