Abstract
Simultaneous dual wavelength operation of a commercial-discharge excited rare gas halide excimer laser is reported for the first time. A combined energy output in excess of 20 mJ was obtained for the 193 and 248 nm ArF and KrF <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">B \rightarrow X</tex> transitions oscillating simultaneously, and also for the 248 and 351 nm KrF and XeF transitions. Analysis indicates that significantly higher dual wavelength energies should be possible.
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