Simulator design for low pressure plasma discharges in planar geometry

Abstract

A design of a simulator code to determine the plasma characteristics in planar geometry discharges is presented. The experimentally obtained parameters are compared to the code predictions. The experimental plasma discharge characteristics were carried out using 99.99% nitrogen as the working gas at typical pressure values in the range 0.1–0.6 Torr. The simulator code was used to obtain the discharge current-voltage, showing compatibility with experimental values. The minimum breakdown voltage at the minimum gas pressure was also obtained. The relation between the discharge current at different anode-cathode distances was also determined.