Abstract
Roughening of amorphous carbon surfaces bombarded by 5 keV Ar-ions is studied by using Monte Carlo simulations, where sputtering is treated in detail by simulating the entire collision cascades and the surface relaxation is described by a Wolf-Villain-type model. The simulations show that bombarded surfaces have self-affine topography on a submicrometer scale. The roughness exponent is found to decrease from α ≈ 0.47 to α ≈ 0.25, when the angle of incidence is varied from 0° to 60°, respectively. In the studied cases the roughness exponent α is nearly independent of the relaxation of the surface. Local surface height fluctuations are monitored to gain insight of the spatio-temporal correlations in the process of erosion.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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