Abstract
Sputtering roughening and ripple formation on amorphous carbon surfaces bombarded by 2, 5 and 10 keV Ar- and Xe-ions are studied by using Monte Carlo simulations, where sputtering is treated in detail by simulating the entire collision cascades and the surface relaxation is described by a Wolf-Villain-type model. The simulations show that bombarded surfaces have self-affine topography on a scale comparable to the cascade dimension, and on larger scales ripples are formed on the surface. In case of the Ar-ion bombardment the wavelength of the ripples depend on the magnitude of the diffusion and on the orientation of the beam as predicted by the continuum theories. In case of the Xe-ion bombardment ripples with well-defined wavelengths were found only at an angle of incidence 60°. In all cases the ripple wavelength was found to increase with the increasing bombarding energy.
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