Simulation study on the spatial and temporal characteristics of focused microwave beam discharge in nitrogen

Abstract

This paper reports a simulation study on a focused microwave (frequency 9.4 GHz, pulse width 2.5 μs, and peak electric field 1.2 kV/cm) discharge in 200 Pa nitrogen. A one-dimensional (1D) fluid model is based on the wave equation for the microwave field propagating through the gas breakdown plasma, the continuity equations for electron, ion and neutral particle densities, and the energy balance equations for mean electron temperature, and nitrogen vibrational and translational temperatures. These equations are numerically solved in a self-consistent manner with a simplified plasma chemistry set, in which the reaction rates involving electrons are calculated from the electron energy distribution function (EEDF) using a two-term expansion method. The spatial and temporal characteristics of the focused microwave breakdown in nitrogen are demonstrated, which include the amplitude of the microwave electric field, and the densities and temperatures of the plasma components. The temporal evolution of the plasma electron density agrees reasonably well with that measured with a microwave interferometer. The spatial-temporal distributions of metastable states are discussed on the plasma chemistry and the character of mean electron temperature. The spatially integrated N2(C3) density shows similar trends with the measured temporal intensity of optical emission spectroscopy, except for a time delay of 100–300 ns. The quantitative discrepancies are explained in light of limitations of the 1D model with a two-term expansion of EEDF. The theoretical model is found to describe the gas breakdown plasma generated by focused microwave beams at least qualitatively.