Abstract
In this paper, simulation study on optimization design of MEMS hydrophone based on AlN (Aluminum Nitride) film is carried out. Based on the theory of elastic mechanics and sound-solid coupling effect, the effect of film shape on the sensitivity and frequency response of the device is studied firstly. Results show that a square shape is beneficial to improving the overall performance of the device. The effects of piezoelectric film thickness and radius on the device performance are studied consequently. Results show that increasing the piezoelectric film radius significantly improves the device sensitivity. Finally, the effects of sandwiched and unequal-thickness piezoelectric structures on the device performance are investigated. It is found that unequal-thickness piezoelectric structures can remarkably improve the device performance. Results of this paper would support the performance improvement of MEMS hydrophones based on AlN film in future research work.
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