Abstract
In this paper, the T-shaped structure of linear ultrasonic motor was studied by means of establishing a THREE-DIMENSIONAL model of mechanical structure through SolidWorks and completing relevant simulation analysis through ANSYS Workbench. The finite element simulation analysis consists of four part: i. modal analysis, it determines the working mode and ensures that the frequency difference between the two working modes is as small as possible; ii. Harmonic response analysis furtherly verifies that the resonant response occurs at the operating mode frequency; iii. transient dynamic analysis demonstrates that the motion trajectory of the motor stator driving foot meets the theoretical requirements of ellipse shape. iv. drive signal and prototype are tested to verify the simulation analysis.
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