Simulation of three-dimensional ion implantation distributions

Abstract

The theoretical model and computer program (AMPITS) of Ashworth and coworkers (1984) for the calculation of projected range distributions of implanted ions in multielement multilayer amorphous targets are extended to provide a new method for the derivation of three-dimensional implantation distributions in single-layer targets. The method involves the computation of the chord range distribution and this, together with the projected range distribution, enables the lateral standard deviation to be evaluated. Computed values of lateral standard deviation are found to agree well with those derived previously by Furukawa and Ishiwara (1982). Three-dimensional distributions are constructed using the projected range and chord range distributions together with the lateral standard deviation in the computer program AMPITS-3D.