Abstract
The electrostatic levitation inertial sensor has a very wide range of applications in the fields of navigation, orientation, motion vector control, and basic physics experiments. This paper takes the sensing probe of the electrostatic suspension inertial sensor as the research object, the motion state of the mass block inside the sensing probe and the electrostatic force it is subjected to are analyzed in detail, and deduce the coefficients of signal transmission and conversion between each module, The mechanical model of the sensing probe is established in ADAMS, and the mechanical model is added to the Simulink control module as the controlled object, Then, the co-simulation analysis of the measurement and control system is carried out. The results show that when the system reaches stability, the steady-state error is7.044×10-14 m. The system has good stability and can meet the requirements of measurement accuracy.
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