Abstract

ABSTRACTThis paper will review the topic of computer simulation of the evolution of grain structure in polycrystalline thin films, with particular attention to the modelling of the grain growth process. If the grain size is small compared to the film thickness, then the grain structure is three-dimensional. As the grains grow to become larger than the film thickness, so that most grains traverse the entire thickness of the film, the microstructure may approach the conditions for a two-dimensional grain structure. Both two- and three-dimensional grain growth have been simulated by various authors.When the grains become large enough for the microstructure to be two-dimensional, the surface energy associated with the two free surfaces of the film becomes comparable to the surface energy of the grain boundaries. In this condition, the free surface may profoundly effect the grain growth. One effect is that grooves may develop along the lines where the grain boundaries meet the free surfaces. This grooving may pin the boundaries against further migration and lead to grain-growth stagnation. Another possible effect is that differences in the free surface energy for grains with different crystallographic orientation may provide a driving force for the migration of the boundaries which is additional to that provided by grain boundary capillarity. Grains with favorable orientations will grow at the expense of grains with unfavorable orientations. The coupling of grain-growth stagnation with an additional driving force can produce abnormal or secondary grain growth in which a few grains grow very large by consuming the normal grains.

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