Abstract
We show that, under certain conditions of practical interest, radio frequency inductive discharges can exhibit kinetic effects arising from the random thermal motion of electrons. The electrical response of the plasma is altered in this kinetic regime. More power is dissipated than is expected from cold plasma theory and the spatial distributions of the induced currents and fields change. Moment- or fluid-based simulations do not normally include these kinetic effects, but we show that the introduction of an appropriate viscosity into the moment equations can make them accurate in the kinetic regime.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
