Simulation of heat conductivity and charging processes in polar dielectrics induced by electron beam exposure

Abstract

The article presents results of simulation of thermal and charging processes arising in polar dielectric materials analysed with scanning electron microscope techniques. Monte- Carlo simulation of electron transport in irradiated target was evaluated to realize field effect models. Simulation of thermal load and charging characteristics was performed using net-point methods. The analysis of injection, thermal and charging processes induced by electron irradiation in ferroelectrics subjected to experimental parameters are also discussed.