Simulation of embedded nanocrystal effects on the electron beam induced current collected by a nano-electrode

Abstract

Three dimensional Monte-Carlo simulation is used to study the electron beam induced current technique. A circular and nanometric electrode is used to collect the induced current. This current is generated by the use of electron beam energy of 1 keV or 5 keV in a perpendicular configuration along a line passing through the electrode. The electrode – sample contact creates a depletion zone assumed of a hemispherical shape. The surface recombination velocity is assumed to be equal to zero, so each charge emerging at the surface of the sample can be collected with a given probability which depends on an opening angle allowing seeing the electrode. The collection process is affected by an embedded spherical nanocrystal which is considered as a recombination center. The strength of the effects depends on the depth of the nanocrystal and on the primary energy.