Abstract

The influence of the charge collecting barrier on the electron beam induced current (EBIC) is studied by numerical solution of the current transport equations in the case of AlGaAs/GaAs heterojunctions. EBIC line scans are simulated as a function of external bias. It is found that the signal cannot be reduced to zero value, in accordance with experimental results. This effect is explained by a non-negligible potential drop outside of the space-charge region under high injection conditions. As a consequence, a more careful treatment is needed when using EBIC to determine band offsets.

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