Abstract
A fluid model of a cylindrical electron cyclotron wave resonance (ECWR) argon discharge is presented. The results for a 1 mTorr argon discharge were checked against the analytical theory, simulation and experimental data. The basic plasma properties as power dissipation, magnetic field, electric potential, electron density and temperature were very well reproduced using predefined boundary conditions for the magnetic potential. The results of this model were further used as inputs for the simulation of plasma expansion into a diffusion region, allowing thus fast and complete modelling of a typical ECWR plasma reactor.
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