Ion energy distribution of an inductively coupled radiofrequency discharge in argon and oxygen

Abstract

We report an experimental investigation of the ion energy distribution in an inductively coupled electron cyclotron wave resonance (ECWR) discharge with a superimposed static magnetic field. The inductively coupled discharge is sustained by applying a 13.56MHz radiofrequency (RF) power to an aluminium single-turn coil located inside the vacuum chamber. The source region was separated by a grid from the diffusion region. Ion energy distribution (IEDF) measurements employing an energy-dispersive mass spectrometer or plasma process monitor (PPM) whose entrance opening was 15cm away from the grid were performed in the diffusion region. The IEDF is composed of two peaks; a low-energy peak due thermalized ions and a high-energy peak due to ions coming directly from the source region without undergoing thermalization. The energetic difference between the groups thus reflects the plasma potential difference between the source region and the diffusion region. The pronounced intensity variation of the high-energy peak with increasing pressure is caused by charge-changing collisions yielding a depletion of the high-energy ions with increasing effective path length.