Abstract
The motion of magnetic and abrasive particles in the current magnetorheological polishing fluid between the surface of polished workpiece and polishing tool is consid-ered as the flow of their mixtures in local equilibrium with the same effective temperatures, depending on the flow rate. It is shown that under the magnetic field due to the magnetic pressure the abrasive particles move to the work-piece surface and are pressed against her. Expression is determined for the pressure of the abrasive particles, under the influence of which during Couette shear, material re-moval from the workpiece surface is carried out at a speed proportional to this pressure and the gradient of the veloc-ity of MRPF flow near the surface of the workpiece. DOI: http://dx.doi.org/10.5755/j01.mech.20.2.6947
Highlights
Creation of a specialized opto-mechanical equipment for a high-quality surface finishing of optical and semiconductor workpieces, the parameters of which meet the modern requirements of aerospace and electronic equipment, is impossible to be based on technologies that use traditional mechanical lapping and polishing powders, containing only an abrasive component [1] and a magnetically sensitive filler [2]
For the implementation of a high-quality finishing surface treatment of special optical workpieces magnetorheological polishing method is used [3, 4], which is based on software-controlled tangential material removal by a magnetorheological polishing fluid (MRPF) jet, formed by the gradient magnetic field, with its local contact with the object of the treatment
Optimization of regime characteristics of the polishing process is based on the control of material removal from the workpiece surface, which depends on the pressing force of MRPF filler particles, the velocity of their tangential movements, the amount and distribution of them through the gap in the zone of the gradient magnetic field
Summary
Creation of a specialized opto-mechanical equipment for a high-quality surface finishing of optical and semiconductor workpieces, the parameters of which meet the modern requirements of aerospace and electronic equipment, is impossible to be based on technologies that use traditional mechanical lapping and polishing powders, containing only an abrasive component [1] and a magnetically sensitive filler (magnetic abrasive treatment) [2]. For the implementation of a high-quality finishing surface treatment of special optical workpieces magnetorheological polishing method is used [3, 4], which is based on software-controlled tangential material removal by a magnetorheological polishing fluid (MRPF) jet, formed by the gradient magnetic field, with its local contact with the object of the treatment. Optimization of regime characteristics of the polishing process is based on the control (weight) of material removal from the workpiece surface, which depends on the pressing force of MRPF filler particles, the velocity of their tangential movements, the amount and distribution of them through the gap in the zone of the gradient magnetic field. Based on consideration of these parameters the most effective compositions of magnetorheological polishing fluids can be created
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