Abstract
Based on the recursive stiffness matrix method, the effective surface permittitivity model of multilayered Surface Acoustic Wave structure was established. By this model the phase velocity dispersive of ZnO/Si layered structure was calculated. The calculation results is in agreement with the experimental results ,which verifies effectiveness and accuracy of the model. Furthermore, the model was also carried out for the determination of the phase velocity and electromechanical coupling coefficients of ZnO/Diamond/Si structure. The best combination of high velocity and high coupling coefficient of the structure was obtained, which provided a good reference for the design of the high performance and high capability Surface Acoustic Wave device.
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