Abstract
Based on the recursive stiffness matrix method, the effective surface permittitivity model of multilayered surface acoustic wave structure is established. By this model, the frequency dispersive characteristic of phase velocity for the ZnO/Si layered structure is calculated. The calculation results are in agreement with the experimental results, which verifies the effectiveness and accuracy of the model. Furthermore, the model is also established for the determination of the phase velocity and electromechanical coupling coefficients of ZnO/Diamond/Si structure. The best combination of high velocity and high coupling coefficient of the structure is obtained, which provides a good reference for the design of a high-performance and high-capability surface acoustic wave device.
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