Abstract
A method is described for calculating thin film ϕ(ρz) curves from the corresponding bulk ϕ(ρz) curves. A multiple scattering Monte Carlo program was used to simulate more than 300 thin film ϕ(ρz) curves with different film–substrate combinations. The simulations were made at normal electron incidence in the energy range 10–30 keV. From these data, a general expression was derived to predict thin film ϕ(ρz) curves for any film–substrate combination at any electron energy for EPMA. Calculated k-ratios were compared with existing measured k-ratios in order to confirm the validity of the model. © 1997 John Wiley & Sons, Ltd.
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