Simulation and fabrication of 0–3 composite PZT films for ultrahigh frequency (100–300 MHz) ultrasonic transducers

Xiaoyang Chen,Zeyu Chen,Qifa Zhou,Chunlong Fei,Ruimin Chen,Ping Yu,Zhongping Chen,K Kirk Shung

doi:10.1063/1.4942857

Xiaoyang Chen, Zeyu Chen + Show 6 more

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This paper presents simulation, fabrication, and characterization of single-element ultrahigh frequency (100–300-MHz) needle ultrasonic transducers based on 0–3 composite Pb(Zr0.52Ti0.48)O3 (PZT) films prepared by using composite ceramic sol-gel film and sol-infiltration technique. The center frequency of the developed transducer at 300-MHz was the highest frequency of PbTiO3 ceramic-based ultrasonic transducers ever reported. Furthermore, a brief description of the composite model was followed by the development of a new expression for predicting the longitudinal velocity, the clamped dielectric constant, and the complex electromechanical coupling coefficient kt of these films, which is very important in ultrasonic transducer design. Moreover, these parameters are difficult to obtain by measuring the frequency dependence of impedance and phase angle because of the weak signal of the previous 0–3 composite films transducer (&gt;100 MHz). The modeling results show that the Cubes model with a geometric factor n = 0.05 fits well with the measured data. This model will be helpful for developing the 0–3 composite systems for ultrahigh frequency ultrasonic transducer design.

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IntroductionThe ultra high frequency (UHF) ultrasonic transducer (>100-MHz) has attracted growing interests because its beam width could approach cellular dimension (micron size). the UHF transducers can be applied to manipulate biological cells and micro-particles. For the UHF transducer, its beam width is inversely proportional to the center frequency of transducer. That suggests that the key to trap smaller size particle or cell is to develop the UHF ultrasonic transducers with higher center frequency
For the ultra high frequency (UHF) transducer, its beam width is inversely proportional to the center frequency of transducer
This paper presents the fabrication and characterization of single-element ultrahigh frequency (100–300-MHz) needle ultrasonic transducers based on 0–3 composite PZT films by combining the composite ceramic sol-gel film technique and sol-infiltration technique

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Introduction

The ultra high frequency (UHF) ultrasonic transducer (>100-MHz) has attracted growing interests because its beam width could approach cellular dimension (micron size). the UHF transducers can be applied to manipulate biological cells and micro-particles. For the UHF transducer, its beam width is inversely proportional to the center frequency of transducer. That suggests that the key to trap smaller size particle or cell is to develop the UHF ultrasonic transducers with higher center frequency. The ultra high frequency (UHF) ultrasonic transducer (>100-MHz) has attracted growing interests because its beam width could approach cellular dimension (micron size).. The composite sol-gel technique is a modified sol-gel method by mixing ceramic powder with sol-gel solution and followed by optimized pyrolysis and annealing steps.. The composite sol-gel technique is a modified sol-gel method by mixing ceramic powder with sol-gel solution and followed by optimized pyrolysis and annealing steps.9,10 This approach has been utilized to fabricate dense and crack-free piezoelectric films in the range of 1–50-lm. The center frequency of the previously built UHF transducers using PbTiO3 based composite films hardly exceeds 200-MHz due to the requirements of low porosity and high content of powder for the films.

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