Abstract
International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 471-475 (2003) Testing and CharacterisationNo AccessSIMULATION AND CHARACTERIZATION OF PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCERS (pMUTs) BASED ON PZT/SOI MEMBRANESJACEK BABOROWSKI, NICOLAS LEDERMANN, PAUL MURALT, and DANIEL SCHMITTJACEK BABOROWSKICeramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015 Lausanne, Switzerland Search for more papers by this author , NICOLAS LEDERMANNCeramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015 Lausanne, Switzerland Search for more papers by this author , PAUL MURALTCeramics Laboratory, Swiss Federal Institute of Technology EPFL, CH-1015 Lausanne, Switzerland Search for more papers by this author , and DANIEL SCHMITTFraunhofer IBMT, St. Ingbert, Germany Search for more papers by this author https://doi.org/10.1142/S146587630300154XCited by:12 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractPiezoelectric micromachined ultrasonic transducers for airborne and immersed applications in the frequencies from 20 kHz in liquid up to 750kHz in air have been simulated by finite element approach, fabricated and investigated. The basic element consisted of a oxidized and platinized silicon membrane coated with a 2 μm thick (100)-textured Pb(Zr,Ti)O3 (PZT) thin film deposited by sol-gel techniques. SOI wafers have been applied to obtain a good definition of the silicon part of the membrane. The unclamping of the silicon membrane at the border increases drastically the coupling factor. For unclamped structures the membranes completely covered with top electrode show the highest coupling coefficient (k2 = 5.6%). Immersed (in FluorinertTM) membranes show 7 times smaller quality factor, while the coupling factor k2 remains the same. The obtained structures were enough sensitive to detect acoustic waves in air and in liquid emitted from the same type of elements at a distance of few centimeters. Good agreement between the experimental results (membrane deflection, admittance in air and in liquid) and FEA simulations has been obtained.Keywords:pMUTsPZTFEA simulations References I. Ladabaumet al., Appl. Phys. Lett. 69, 3674 (1998). Google ScholarJ. J. Bernsteinet al., IEEE Trans. UFFC 44, 960 (1997). Crossref, Google ScholarG. Perçinet al., Appl. Phys. Lett. 72, 1397 (1998). Crossref, Google Scholar P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P. K. Weber, W. Steichen, S. Petitgrand, A. Bosseboeuf, N. Setter, and P. Gaucher. Proceedings of IEEE Ultrasonic Symposium 2001. Atlanta (USA), p. 907-911 . Google Scholar N. Ledermann, P. Muralt, J. Baborowski, S. Gentil, K. Mukati, M. Cantoni, A. Seifert and N. Setter, Sensors and Actuators A, in press (2003) . Google Scholar FiguresReferencesRelatedDetailsCited By 12An alN-based piezoelectric micromachined ultrasonic transducer with a double-beam suspended structureYihsiang Chiu, Li Wang, Dan Gong, Yang Yang and Weili Wang et al.19 December 2021 | Journal of the Chinese Institute of Engineers, Vol. 45, No. 2A thickness-mode piezoelectric micromachined ultrasound transducer annular array using a PMN–PZT single crystalWoojin Kang, Joontaek Jung, Wonjun Lee, Jungho Ryu and Hongsoo Choi26 April 2018 | Journal of Micromechanics and Microengineering, Vol. 28, No. 7Ferroelectric Ceramics: Devices and Applications11 February 2017Writing Ferroelectric Nanodomains in PZT Thin Film at Low TemperaturesAlexandr Vakulenko, Natalia Andreeva, Sergej Vakhrushev, Alexandr Fotiadi and Alexey Filimonov20 September 2016Perovskite ferroelectric nanomaterialsNurxat Nuraje and Kai Su1 Jan 2013 | Nanoscale, Vol. 5, No. 19Finite Element Analysis of Piezoelectric Thin Film Membrane StructuresHongsoo Choi, Jow-Lian Ding, Amita Bandyopadhyay and Susmita Bose1 Oct 2007 | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 54, No. 10Size Effect on the Device Performance of K31 Type pMUTs: Experiments and Equivalent Circuit AnalysisH.S. Choi, L. Diebler, J.L. Ding, S. Bose and A. Bandyopadhyay1 Oct 2006Ferroelectric thin films: Review of materials, properties, and applicationsN. Setter, D. Damjanovic, L. Eng, G. Fox and S. Gevorgian et al.1 Sep 2006 | Journal of Applied Physics, Vol. 100, No. 5P2P-3 Numerical and Experimental Study of the Dynamic Behavior of Piezoelectric Micromachined Ultrasonic Transducers (pMUTs)H. S. Choi, J. L. Ding, S. Bose and A. Bandyopadhyay1 Jan 2006Piezoelectric micromachined ultrasonic transducers based on PZT thin filmsP. Muralt, N. Ledermann, J. Paborowski, A. Barzegar and S. Gentil et al.1 Dec 2005 | IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 52, No. 12Microfabrication of Piezoelectric MEMSJ. Baborowski1 Jan 2005Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin FilmsP. Muralt1 Jan 2005 Recommended Vol. 04, No. 03 Metrics History KeywordspMUTsPZTFEA simulationsPDF download
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