STUDIES IN NONLINEAR EFFECTS OF SQUEEZE FILM DAMPING IN MEMS STRUCTURES

Abstract

International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 477-480 (2003) Testing and CharacterisationNo AccessSTUDIES IN NONLINEAR EFFECTS OF SQUEEZE FILM DAMPING IN MEMS STRUCTURESASHOK K. PANDEY and R. PRATAPASHOK K. PANDEYCranesSci MEMS Lab, Department of Mechanical Engineering, Indian Institute of Science, Bangalore-560012, India Search for more papers by this author and R. PRATAPCranesSci MEMS Lab, Department of Mechanical Engineering, Indian Institute of Science, Bangalore-560012, IndiaCorresponding author. Tel.: +91-80-3942671; +91-80-3608659; fax: +91-80-3600648. Search for more papers by this author https://doi.org/10.1142/S1465876303001551Cited by:8 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractStructural vibration studies of various MEMS structures have revealed that whenever a suspended flat structure vibrates normal to a fixed substrate with a very small gap between the two surfaces, the squeeze film damping due to fluid present in the gap dominates the dissipation mechanism by orders of magnitude compared with other losses. Since the quality factor is a critical parameter in the design of MEMS devices and it depends on damping, a careful evaluation of the squeeze film damping is necessary. The most often used formulas for evaluating this damping, due to Blech and Griffins, are based on the linearized Reynolds equation. These formulas are applicable for small amplitude oscillations. In this paper, we consider all nonlinear terms in the governing equation of the flow between the plates and study the effects of these terms on the damping characteristics. We show that as the amplitude of vibration increase, the damping force increases faster than the spring force of the fluid and, therefore, the cut-off frequency changes nonlinearly.Keywords:Nonlinear Squeeze film damplingcutoff squeeze numberquality factor References W. E. Langlois, Quart. App. Mathematics 20(2), 131 (1962). Crossref, Google Scholar O. Pinkus and B. Sternlicht , Theory of Hydrodynamic Lubrication ( McGraw-Hill , NY , 1961 ) . Google ScholarJ. J. Blech, J. of Lubrication Technology 105, 615 (1983). Crossref, Google ScholarW. S. Griffin, H. H. Richardson and S. Yamamami, Trans. of ASME 451 (1966). Google ScholarHiroshi Hosaka, Kiyoshi Itao and Susumu Kuroda, Sensors and Actuators A 49, 87 (1995). Crossref, Google ScholarM. Andrews, I. Harris and G. Turner, Sensors and Actuators A 36(2), 79 (1993). Crossref, Google Scholar Y.-J. Yang, M.-A. Gretillat and S. D. Senturia, Effect of Air Damping on the Dynamics of Nonuniform Deformations of Microstructures, Transducers 97, Chicago, 2 (June 1997) 1093-1096 . Google Scholar J. Antunes and P. Piteau, A Nonlinear Model for Squeeze-film Dynamics under Axial Flow, ASME PVP Conference, Symposium on Flow-Induced Vibration 2001, Atlanta, USA, 2001 . Google Scholar J. W. Thomas , Numerical Partial Differential Equations: Finite Difference Methods ( Springer-Verlag , New York , 1995 ) . Crossref, Google Scholar FiguresReferencesRelatedDetailsCited By 8Damping and stiffening forces of a squeeze film between two platesShangyi Chen and Z. C. Feng28 October 2016 | Nonlinear Dynamics, Vol. 87, No. 3A novel approach to the analysis of squeezed-film air damping in microelectromechanical systemsWeilin Yang, Hongxia Li, Aveek N Chatterjee, Ibrahim (Abe) M Elfadel and Ilker Ender Ocak et al.2 November 2016 | Journal of Micromechanics and Microengineering, Vol. 27, No. 1Prediction of pull-in phenomena and structural stability analysis of an electrostatically actuated microswitchC. Sri Harsha, C. S. Prasanth and B. Pratiher17 May 2016 | Acta Mechanica, Vol. 227, No. 9Analysis of squeeze film air damping in MEMS with lattice Boltzmann methodWeilin Yang, Hongxia Li, TieJun Zhang, Aveek N. Chatterjee and Ibrahim M. Elfadel1 May 2016Limits of linearity in squeeze film behavior of a single degree of freedom microsystemShujuan Huang, Diana-Andra Borca-Tasciuc and John Tichy2 November 2013 | Microfluidics and Nanofluidics, Vol. 16, No. 6Interface electronics and controller for an electrostatically actuated MEMS based microgripperMuhammad Bilal Saif, Shafaat A. Bazaz and Nisar Ahmed1 Dec 2009Thermal characterization of microheaters from the dynamic responseBalaji Jayaraman, Navakanta Bhat and Rudra Pratap9 July 2009 | Journal of Micromechanics and Microengineering, Vol. 19, No. 8Coupled nonlinear effects of surface roughness and rarefaction on squeeze film damping in MEMS structuresAshok Kumar Pandey and Rudra Pratap14 July 2004 | Journal of Micromechanics and Microengineering, Vol. 14, No. 10 Recommended Vol. 04, No. 03 Metrics History KeywordsNonlinear Squeeze film damplingcutoff squeeze numberquality factorPDF download