Abstract
The plasma profiles in a 300 cm rectangular plasma source sustained with multiple low-inductance antenna (LIA) modules were investigated using a fluid-simulation code. The profiles of argon plasmas sustained with two LIA modules were investigated in order to evaluate the appropriate spacing between LIA modules for obtaining uniform plasmas in multiple antenna configurations. For designing meter-scale large-area plasma sources, the simulation in the rectangular chamber with multiple LIA modules was carried out. Argon ion (Ar+) and metastable radical neutral (Ar*) distributions with a nonuniformity of <6.0% in a 220 cm rectangular area were obtained with the proper arrangement of antenna modules.
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