Abstract

Super-smooth and optical glass and fused silica substates are needed in many high-technology applications. Present paper describes a bowl-feed based technique for polishing super-smooth substrates using conventional optical grinding, polishing machine. Constructions of the polishing setup, polishing-holders, polishing attachments etc. have been discussed. Results for BK-7 and fused silica (Suprasil-I) samples have been presented.

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