Abstract

This article presents a technique to estimate, nondestructively, the thickness, porosity and refractive index of porous silicon samples. The technique is based on the Fabry-Perot interference spectrum analyzed by the Reflectometric Interference Fourier Transform Spectroscopy (RIFTS). The technique, also known as SLIM - Spectroscopic Liquid Infiltration Method (Segal 2007) takes into account the infiltration of a liquid with known refractive index inside the pores of the samples.

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