Abstract
A novel, relatively simple and cost effective method is reported to fabricate suspended silicon nanowires. This method allows for the production of suspended silicon nanowires using anisotropic wet etching and thermal oxidation of single crystalline silicon. The dimensions of the silicon nanowires fabricated with the proposed method are evaluated. The vibration properties of the nanowires obtained by heterodyne laser doppler interferometer show the potential of being nanomechanical sensors.
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