Abstract
A simple fast line scan microscopic imaging approach based on a wavelength-space-time mapping technique has been proposed. With a lab-made subpicosecond pulse laser with 10 dB bandwidth of 12 nm, we experimentally demonstrate a free-space optical apparatus designed for fast line scan imaging of microscopic objects. This system has a spatial resolution of 22 μm, field-of-view of 2.5 mm, and line scan rate of 20.9 MHz. By imaging a modified unitraveling carrier photodetector, we demonstrate the application of semiconductor device inspection for speeding up quality control.
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