Abstract
SIMPL is a computer-aided-design (CAD) tool for simulating the cross-sectional profile of integrated circuits along an arbitrary cut-line drawn on the layout. The linked-list arbitrary polygonal data structure, process specification file, physical process algorithms, graphics display interface, and linking to external rigorous process simulators of SIMPL-2 are described. SIMPL-2 is capable of displaying in color two-dimensional process effects such as the bird's-beak, lateral diffusion, undercut in etching, and sidewall coverage in deposition, based on its linked-polygonal and grid-type databases. The device profile from the composite can be generated rapidly in several minutes on a VAX 11/780 using elementary internal physical process models. SIMPL-2 can also invoke more rigorous external process simulators through an interface for profile data and transfer of control, providing a heretofore missing link between layout-based CAD tools and process and device simulators. >
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