Abstract
Sputtered noble gas-metal vapour ion lasers excited by hollow-cathode (HC) discharge have been promising sources of UV radiation for many years [1], however, some technological problems have made them unpractical. The recent investigations of the noble gas-metal vapour ion lasers excited by the transverse capacitively-coupled radio-frequency (RF) discharges disclosed similarities between the HC and RF discharges [2]. This suggests that the RF discharge may be an advantageous substitute for the HCD in the case of the sputtered He(Ne)-metal vapour ion lasers.
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