Abstract
A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/°C.
Highlights
Fiber-optic Fabry–Perot interferometric pressure sensors have been attracting the attention in a wide range of fields such as biomedicine, healthcare, civil engineering, petroleum, automotive, and aerospace industries for their high sensitivity and immunity to electromagnetic interference [1,2,3].these types of interferometers are compact and easy to be used
Some Fabry–Perot interferometer (FPI) sensors utilize change in the cavity length while others utilize the variation in refractive index (RI) of the cavity medium to detect pressure [4,5,6,7]
We propose and experimentally demonstrate novel fiber based FPI sensor for gas
Summary
Fiber-optic Fabry–Perot interferometric pressure sensors have been attracting the attention in a wide range of fields such as biomedicine, healthcare, civil engineering, petroleum, automotive, and aerospace industries for their high sensitivity and immunity to electromagnetic interference [1,2,3]. Most of the aforementioned sensors show relatively low sensitivities and are unsuitable for low pressure measurements Some of these sensors exhibit high sensitivities, they involve complex fabrication processes. We propose and experimentally demonstrate a novel fiber based The. FPI sensor for gas pressure measurement with high sensitivity and low temperature cross-sensitivity. To its much lower Young’s modulus, silicone rubber extremely softthereby and theresulting diaphragm from thisDue material is sensitive even when subjected to a low air is pressure level, in fabricated from this material is sensitive even when subjected to a low air pressure level, thereby a high sensitivity. Applications such as respiration monitors [14]
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