Abstract
Silicon nitride cantilevers with a silicon probe have been developed for force microscopy of soft samples in water. The cantilevers were soft with a small spring constant of from 0.05 to 0.11 N/m and some showed resonance of 20 kHz or higher in water. The typical dimensions of a cantilever were 40 µm ×15 µm ×0.19 µm. Autofluorescent light emissions from the resulting cantilever and probe were studied. Autofluorescence of the silicon nitride cantilever was smaller than that of a conventional silicon nitride cantilever. Autofluorescence of the silicon probe was small and of negligible intensity for fluorescence optical microscopy. The cantilever probe less disturbs fluorescence optical microscopy than conventional soft cantilever probes.
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